Solar cell production system

  • Carbonless Polycrystalline Si Fusion

    The World's Fisrt Carbonless Polycrystalline Silicon Fusion Furnace! We offer eco-friendly equipment combined high quality and energy saving.

  • Polycrystalline Si Fusion Furnace

    This is a fusion furnace producing Polycrystalline Silicon ingot. We provide the high-quality, high-productivity and low-cost equipment.

  • Vertical Diffusion Furnace

    This is next generation diffusion furnace responding to upsizing wafer. High-quality and low-cost equipment with three-tube and single transfer structure is realized.

  • High-performance Firing Furnace

    W/B(=Walking Beam) type tact conveyance which is our original wafer conveyance technology is adopted instead of conventional mesh belt type conveyance. Energy saving and space saving are realized by this conveyance method.

  • Drying Furnace / Firing Furnace for DSC

    For improvement in performance of DSC (Dye-Sensitised Solar Cell), high-precision heating is indispensable!